不锈钢真空腔体是采用高洁净度，低放气率的不锈钢材料进行焊接，从腔体内部进行满焊，外部加强焊。不锈钢材料有sus304、sus316L，依据工艺严苛程度和真空度要求选择合适材料，腔体表面处理有机械抛光、镜面抛光、电解抛光。依据真空度和洁净度要求选择不同的表面处理。通常电解抛光可以满足高洁净度和超高真空的表面处理要求，为了更快获得超高真空的要求在电解抛光后再通过高温炉对腔体进行高温除气，将腔体材料内的气体释出。

The stainless steel vacuum chamber is welded using high-cleanliness, low outgassing stainless steel materials, with full welding from the inside and reinforced welding on the outside. Stainless steel materials include SUS304 and SUS316L, and appropriate materials are selected based on the severity of the process and vacuum requirements. The surface treatment of the chamber includes mechanical polishing, mirror polishing, and electrolytic polishing. Different surface treatments are selected based on the vacuum and cleanliness requirements. Generally, electrolytic polishing can meet the surface treatment requirements for high cleanliness and ultra-high vacuum. In order to achieve ultra-high vacuum more quickly, the chamber undergoes high-temperature degassing in a high-temperature furnace after electrolytic polishing to release the gas inside the chamber material.

铝合金材料相较于不锈钢材料质量更轻，组装设备后，设备的整体重量更轻。铝合金表面通过阳极氧化后，在表面形成致密的氧化层，也具有很好的耐

腐蚀性，可以用于CVD、ETCH等较严苛的工艺。铝合金真空腔体常用铝合金材料有6061、5083、7075等，铝合金真空腔体的加工有焊接工艺和CNC-体加工工艺，CNC加工适用于高精度复杂工艺，能有效控制残余应力，避免变形。铝合金腔体通过表面钝化处理，可以提高抗氧化性，降低材料出气率。

Aluminum alloy materials are lighter in weight compared to stainless steel materials, and are used for assembling equipment Afterwards, the overall weight of the equipment is lighter. The aluminum alloy surface is treated by anodic oxidationAfter oxidation, a dense oxide layer is formed on the surface, which also exhibits excellent corrosion resistance Corrosive, suitable for use in more stringent processes such as CVD and ETCH. aluminium

Commonly used aluminum alloy materials for alloy vacuum chambers include 6061, 5083, 7075, etc., the processing of aluminum alloy vacuum chambers involves Welding process and CNC machining process, CNC machining is suitable for high precision The sophisticated craftsmanship can effectively control residual stress and avoid deformation. aluminium The alloy cavity undergoes surface passivation treatment to enhance its oxidation resistance,Reduce the outgassing rate of the material.