

赛米瑟真空观察窗是真空设备的关键组件,用于在维持系统真空度的同时,实现内部过程的实时观察或光学监测。其设计需兼顾高密封性、耐压性及透光性,广泛应用于科研、半导体、镀膜等领域。
Semi serve vacuum viewpoint is a key component of vacuum equipment, used to maintain system vacuum while achieving real-time observation or optical monitoring of internal processes. Its design needs to balance high sealing, pressure resistance, and transparency, and is widely used in scientific research, semiconductor, coating, and other fields.



真空观察窗的典型应用:
半导体制造:晶圆刻蚀、CVD 过程监控。
Semiconductor manufacturing: wafer etching, CVD process monitoring.
科研装置:粒子加速器、同步辐射光源的视口。
Research equipment: Particle accelerator, synchrotron radiation light source viewport.
镀膜设备:光学镀膜厚度实时监测。
Coating equipment: Real time monitoring of optical coating thickness.
电子显微镜:样品室真空隔离与观察。
Electron microscope: sample chamber vacuum isolation and observation.
航天测试:模拟太空环境的舱体观测。
Aerospace testing: Observation of spacecraft in simulated space environments.
真空观察窗的产品结构和材料:
视窗材料
Glass material
光学玻璃:经济实用,适用于可见光范围,耐温达300℃。
Borosilicate glass: economical and practical, suitable for visible light , with a temperature resistance of up to 300 ℃.
石英玻璃:高紫外透过率,耐温至1200℃,适合高温/激光应用。
Quartz glass: high UV transmittance, temperature resistance up to 1200 ℃, suitable for high temperature and laser applications.
蓝宝石:超高硬度与红外透光性,耐腐蚀,用于极端环境。
Sapphire: With ultra-high hardness and infrared transparency, it is corrosion-resistant and suitable for extreme environments.
密封方式
Sealing method
无氧铜金属密封:用于超高真空(≤10-⁸ Pa),高温烘烤耐受。
OFHC gasket metal seal : used for ultra-high vacuum (≤ 10-⁸ Pa), high temperature baking resistance.
O型圈密封:适用于中低真空,便捷更换。
Centering ring seal : suitable for medium and low vacuum, easy to replace.
法兰接口
Type of flange
标准法兰:CF法兰、KF法兰、ISO法兰,兼容主流真空系统。
Standard flanges: CF flange, KF flange, ISO flange, compatible with commonly used vacuum systems.
定制化:支持非标尺寸及异形法兰适配。
Customization: Supports non-standard size and irregular flange adaptation.
产品特性:
高真空密封:泄漏率<1×10-10 Pa·m3/s,确保系统稳定性。
High vacuum sealing: leakage rate<1 × 10 -10 Pa · m3/s, ensuring system stability.
宽温域适配:石英窗耐受-80℃至1000℃(短期峰值1200℃)。
Wide temperature range adaptation: Quartz windows can withstand temperatures ranging from -80 ℃ to 1000 ℃ (short-term peak temperature of 1200 ℃).
多光谱透过:可选材料覆盖紫外到红外波段(如石英透光范围0.2~2.5μm)。
Multispectral transmission: Optional materials can cover the ultraviolet to infrared wavelength range (such as quartz transmission range of 0.2~2.5 μ m).
抗冲击设计:蓝宝石窗片可承受0.5MPa压差,防爆型可选。
Impact resistant design: Sapphire window panels can withstand a pressure difference of 0.5MPa, and explosion-proof types are optional.
耐腐蚀涂层:可选镀膜处理(如防反射膜、耐酸碱涂层),延长寿命。
Corrosion resistant coating: Optional coating treatment (such as anti reflection film, acid alkali resistant coating) can extend the service life.