通常情况下真空泵抽真空系统内的气体时，腔体和管道内不是单纯的空气，经常包含粉尘颗粒、液体、蒸汽、甚至有害气体成分，这些制程物被抽入真空泵后，积累到一定量时会对真空泵造成损坏，所以当抽入的气体不干净时，要事先对气体进行净化，需要在真空泵前面配置过滤器或气液分离等装置。同样如果真空泵排气中含有粉尘、油气、蒸汽、有害物质时，为避免对周边环境影响，也要对真空泵排气口排出的气体进行净化，保护环境和作业人员。

赛米瑟真空过滤器、气液分离器产品能够提供整套的真空净化解决方案，确保真空系统高效稳定洁净的运行，我们的过滤净化产品包括标准化产品和客制化产品。

In general, when a vacuum pump extracts gas from a vacuum system, the cavity and pipes do not contain only air; they often include dust particles, liquids, vapors, and even harmful gas components. When these substances are drawn into the vacuum pump and accumulate to a certain level, they can damage the pump. Therefore, when the gas being drawn in is not clean, it is necessary to purify the gas beforehand, which requires the installation of filters or gas-liquid separators in front of the vacuum pump. Similarly, if the exhaust from the vacuum pump contains dust, oil vapor, steam, or harmful substances, it is also necessary to purify the gas discharged from the vacuum pump's exhaust to avoid impacting the surrounding

environment and to protect the environment and personnel. The Semisys vacuum filters and gas-liquid separators can provide a complete vacuum purification solution, ensuring the efficient, stable, and clean operation of the vacuum system. Our filtration and purification products include standard and customized options.