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MEMS真空计

    SMG MENS皮拉尼真空计是基于目前先进的MEMS传感技术构建的一个精致的,小体积的传感器,这大大节约了安装使用空间。同时基于MEMS技术的皮拉尼还具有更宽的测量范围,具有比传统皮拉尼测量更准确、稳定性更高。真空计测量范围从1000~5X10-5mbar,100~1X10-3mbar精度可达±5%。

    The SMG MENS Pirani vacuum gauge is a delicate, small-sized sensor built on advanced MEMS sensing technology, which greatly saves installation and usage space. Meanwhile, Pirani based on MEMS technology also has a wider measurement range, with higher accuracy and stability than traditional Pirani measurements. The measurement range of the vacuum gauge is from 1000~5X10-5mbar, and the accuracy can reach±5% at 100~1X10-3mbar.


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